Research

Parsons research group studies chemical reactions on surfaces, with focus on thin film formation by Atomic Layer Deposition Our research is sponsored by several federal agencies, including the National Science Foundation and the U.S. Dept. of Defense, as well as a number of private corporations. We work closely with VaporPulse Technologies as a small business partner to evaluate commercial applications for our work.

Read about the basics of ALD and learn more about our research focus areas using the links below.

Fundamental
Reactions

ALD and MOFs

MOF cover photo

Atomic Layer Etching

ALD on Polymers and Fibers

ALD for Energy

DSSC Cover

Film Nucleation and Substrate Selectivity

Patterning

Spatial ALD

 

Capture