Publications

2022
2021
2020
2019
2018
2017
2016
2015
2014
2013
2012
2011
2010 and Earlier

2022

268: Nye, R. A.; Song, S. K.; Dongen, K. V.; Delabie, A.; Parsons, G. N.

Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition

Appl. Phys. Lett. 2022 
DOI: 10.10163/5.0106132

267: Wang, S. Y.; Pirzada, T.; Xie, W. Y.; Barbieri, E.; Hossian, O.; Opperman, C. H.; Pal, L.; Wei, Q. S.; Parsons, G. N.; Khan, S. A.

Creating hierarchically porous banana paper-metal organic framework (MOF) composites with multifunctionality

Appl. Mater. Today 2022 
DOI: 10.1016/j.apmt.2022.101517

266: Saare, H.; Dianat, G.; Parsons, G. N.

Comparative In Situ Study of the Initial Growth Trends of Atomic Layer-Deposited Al(2)O(3) Films

J. Phys. Chem. C. 2022
DOI: 10.1021/acs.jpcc.2c01033

265: Morgan, S.; Willis, M.; Peterson, G.; Mahle, J.; Parsons, G. N.

Green MOF-Fabrics: Benign, Scalable Sorption-Vapor Synthesis of Catalytic Composites to Protect against Phosphorus-Based Toxins

Appl. Mater. Today 2022 
DOI: 10.1021/acssuschemeng.1c07512

264: Lee, D. T.; Zijian, D.; Peterson, G. W.; Hall, M. G.; Pomerantz, N. L.; Hoffman, N.; Parsons, G. N.; Jones, J. L.

Highly Breathable Chemically-Protective MOF-Fiber Catalysts
Adv. Funct. Mater. 2022 

DOI: 10.1002/adfm.202108004

263: Nye, R. A.; Wang, S. Y.; Uhlenbrock, S.; Smythe, J.A.; Parsons, G. N.

In situ analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors

Dalton Trans. 2022 
DOI: 10.1039/d1dt03689k

262: Hsain, H. A.; Lee, Y.; Materano, M.; Mittmann, T.; Payne, A.; Mikolajick, T.; Schroeder, U. Parsons, G. N.; Jones, J. L.

Many routes to ferroelectric HfO2: A review of current deposition methods

J. Vac. Sci. Technol. 2022 
DOI: 10.1116/6.0001317

2021

261: Kim, J. S.; Parsons, G.N.
Nanopatterned Area-Selective Vapor Deposition of PEDOT on SiO2 vs Si-H: Improved Selectivity Using Chemical Vapor Deposition vs Molecular Layer Deposition
Chem Mater. 2021
DOI: 10.1021/acs.chemmater.1c02842
260: Limbu, T. B.; Adhikari, B.; Song, S.K.; Chitara, B.; Tang, Y. G.; Parsons, G. N.; Yan, F.

Toward understanding the phase-selective growth mechanism of films and geometrically-shaped flakes of 2D MoTe2

RSC Adv.. 2021 
DOI: 10.1039/d1ra07787b

259: Dai, Z. J.; Pradeep, S.; Zhu, J.; Xie, W. Y.; Barton, H.F.; Si, Y.; Ding, B.; Yu, J. Y.; Parsons, G. N.

Freestanding Metal Organic Framework-Based Multifunctional Membranes Fabricated via Pseudomorphic Replication toward Liquid- and Gas-Hazards Abatement

Adv. Mater. Interfaces. 2021 
DOI: 10.1002/admi.202101178

258: Chen, I.T; Dai, Z.J.; Chen, Y. A.; Parsons, G. N.; Chang, C. H.

Fabrication of Non-Uniform Nanolattices with Spatially Varying Geometry and Material Composition 

Adv. Mater. Interfaces. 2021 
DOI: 10.1002/admi.202100690

257: Song, S.K.; Kim, J.; Margavio, H.; Parsons, G.N.

Multi-Material Self-Aligned Nano-Patterning by Simultaneous Adjacent Thin Film Deposition and Etching

ACS Nano. 2021
DOI: 10.1021/acsnano.1c04086

256: Morgan, S.; O’Connell, A.; Jansson, A.; Peterson, G.; Mahle, J.; Eldred, T.; Gao, W.; Parsons, G. N.

Stretchable and multi-MOF fabrics via high-yield rapid sorption-vapor synthesis, and application to chemical warfare agent hydrolysis

ACS Appl. Mater. Interfaces. 2021 
DOI: 10.1021/acsami.1c07366

255: Peterson, G. W.; Lee, D. T.; Barton, H. F.; Epps, T. H.; Parsons, G. N.

Fibre-based composites from the integration of metal-organic frameworks and polymers

Nat. Rev. Mater. 2021 
DOI: 10.1038/s41578-021-00291-2

254: Volk, A. A.; Kim, J. S.; Jamir, J.; Dickey, E. C.; Parsons, G. N. 

Oxidative molecular layer deposition of PEDOT using volatile antimony(V) chloride oxidant

J. Vac. Sci. Technol. 2021 
DOI: 10.1116/6.0000791

253: Barton, H. F.; Jamir, J. D.; Davis, A. K.; Peterson, G. W.; Parsons, G. N.

Doubly Protective MOF-Photo-Fabrics: Facile Template-Free Synthesis of PCN-222-Textiles Enables Rapid Hydrolysis, Photo-Hydrolysis and Selective Oxidation of Multiple Chemical Warfare Agents and Simulants

Eur. J. Chem.. 2021 
DOI: 10.1002/chem.202003716

252: Lee, Y.; Hsain, H. A.; Fields, S.S.; Jaszewski, S. T.; Horgan, M. D.; Edgington, P.G.; Ihlefeld, J.F.; Parsons, G. N.; Jones, J. L.

Unexpectedly large remanent polarization of Hf0.5Zr0.5O2 metal-ferroelectric-metal capacitor fabricated without breaking vacuum

Appl. Phys. Lett. 2021 
DOI: 10.1063/5.0029532

2020

figure 251: Saare, H.; Song, S.K.; Kim, J.; Parsons, G.N.

Effect of Reactant Dosing on Selectivity during Area-Selective Deposition of TiO2 via Integrated Atomic Layer Deposition and Atomic Layer Etching

Journal Of Applied Physics. 2020
DOI: 10.1063/5.0013552

250: Dai, Z.; Zhu, J.; Yan, J.; Su, J.; Gao, Y.;  Zhang, X.; Ke, Q.; Parsons, G. N.

An Advanced Dual‐Function MnO2‐Fabric Air Filter Combining Catalytic Oxidation of Formaldehyde and High‐Efficiency Fine Particulate Matter Removal

Advanced Functional Materials. 2020 
DOI: 10.1002/adfm.202001488

Scheme 1 249: Wang, S.; Pomerantz, N. L.; Dai, Z.; Xie, W.; Anderson, E. E.; Miller, T.; Khan, S. A.; Parsons, G. N.

Polymer of intrinsic microporosity (PIM) based fibrous mat: combining particle filtration and rapid catalytic hydrolysis of chemical warfare agent simulants into a highly sorptive, breathable, and mechanically robust fiber matrix

Materials Today Advances. 2020 
DOI: 10.1016/j.mtadv.2020.100085

Abstract Image 248: Parsons, G. N.; Clark, R.D.

Area Selective Deposition: Fundamentals, Applications and Future Outlook

Chemistry Of Materials. 2020 
DOI: 10.1021/acs.chemmater.0c00722

Abstract Image 247: Wang, S.; Shi, K.; Tripathi, A.; Chakraborty, U.; Parsons, G. N.; Khan, S.

Designing Intrinsically Microporous Polymer (PIM-1) Microfibers with Tunable Morphology and Porosity via Controlling Solvent/Nonsolvent/Polymer Interactions

ACS Applied Polymer Materials. 2020 
DOI: 10.1021/acsapm.0c00386

Abstract Image 246: Barton, H.F.; Davis, A.; Parsons, G. N.

The effect of surface hydroxylation on MOF formation on ALD metal oxides:  MOF-525 on TiO2/polypropylene for catalytic hydrolysis of chemical warfare agent simulants

ACS Applied Materials and Interfaces. 2020 
DOI: 10.1021/acsami.9b20910

Graphical abstract: Fabrication of a freestanding metal organic framework predominant hollow fiber mat and its potential applications in gas separation and catalysis 245: Dai, Z.; Lee, D. T.; Shi, K.; Wang, S.; Barton, H. F.; Zhu, J.; Yan, J.; Ke, Q.; Parsons, G. N.

Fabrication of Freestanding Metal Organic Framework Predominant Hollow Fiber Mat and Its Potential Applications in Gas Separation and Catalysis

Journal of Materials Chemistry A. 2020 
DOI: 10.1039/C9TA11701F

Abstract Image 244: Nye, R. A.; Kelliher, A.; Gaskins, J.; Hopkins, P.; Parsons, G. N.

Understanding Molecular Layer Deposition Growth Mechanisms in Polyurea via Picosecond Acoustics Analysis

Chemistry of Materials. 2020 
DOI: 10.1021/acs.chemmater.9b0472

Figure 243: Xie, Wenyi; Parsons, G. N.

Thermal atomic layer etching of metallic tungsten via oxidation and etch reaction mechanism using Oor Ofor oxidation and WCl6 as the chlorinating etchant

Journal of Vacuum Science and Technology A. 2020 
DOI: 10.1116/1.5134430

2019

242: Lee, D. T.; Parsons, G. N.

Protective Fabrics: Metal-Organic Framework Textiles for Rapid Photocatalytic Sulfur Mustard Simulant Detoxification

Matter. 2019 
DOI: 10.1016/j.matt.2019.11.005

Figure 1 241: Hill, G. T.; Lee, D. T.; Williams, P. S.; Needham, C. D.; Dandley, E. C.; Oldham, C. J.; Parsons, G. N.

Insight on the Sequential Vapor Infiltration Mechanisms of Trimethylaluminum with Poly(methyl methacrylate), Poly(vinylpyrrolidone), and Poly(acrylic acid)

J. Phys Chem. C. 2019 
DOI: 10.1021/acs.jpcc.9b02153

Figure 1 240: Song, S. K.; Saare, H.; Parsons, G. N.

Integrated Isothermal Atomic Layer Deposition/Atomic Layer
Etching Super-Cycles for Area-Selective Deposition of TiO

Chemistry of Materials. 2019 
DOI: 10.1021/acs.chemmater.9b01143

239: Fusco, M. A.; Oldham, C. J.; Parsons, G. N.

Investigation of the Corrosion Behavior of Atomic Layer Deposited Al2O3/TiO2 Nanolaminate Thin Films on Copper in 0.1 M NaCl

Materials. 2019 
DOI: 10.3390/ma12040672

Figure 238: Parsons, G. N. 

Functional model for analysis of ALD nucleation and quantification of area-selective deposition

Journal of Vacuum Science and Technology A. 2019
DOI: 10.1116/1.5054285

2018

image 237: Lee, D. T.; Jamir, J. D.; Peterson, G. W.; Parsons, G. N. 

Water-Stable Chemical-Protective Textiles viz Euhedral Surface-Oriented 2D Cu-TCPP Metal-Organic Frameworks

Small. 2018
DOI: 10.1002/smll.201805133

Figure 236: Stevens, E. C.; Mousa, M. M.; Parsons, G. N.

Thermal Atomic Layer Deposition of Sn Metal Using SnCl4 and a Vapor Phase Silyl Dihydropyrazine Reducing Agent

Journal of Vacuum Science and Technology A. 2018
DOI:10.1116/1.5055212

Figure 235: King, M.X.; Theofanis, P.; Lemaire, P.C.; Santiso, E.; Parsons, G. N. 

Ab initio Analysis of Nucleation Reactions during Tungsten Atomic Layer Deposition on Si(100) and W(110) Substrates

Journal of Vacuum Science and Technology A. 2018 
DOI:10.1116/1.5044740

Figure 1 234: Xie, W.; Khan, S. A.; Rojas, O. J.; Parsons, G. N.

Control of Micro- and Mesopores in Carbon Nanofibers and Hollow Carbon Nanofibers Derived from Cellulose Diacetate via Vapor Phase Infiltration of Diethyl Zinc

ACS Sustainable Chemistry & Engineering. 2018
DOI:10.1021/acssuschemeng.8b02014

233: Cui, K.; Lemaire, P. C.; Zhao, H.; Savas, T.; Parsons, G. N.; Hart, A.J. 

Tungsten-Carbon Nanotube Composite Photonic Crystals as Thermally Stable Spectral-Selective Absorbers and Emitters for Thermophotovoltaics

Advanced Energy Materials. 2018 
DOI:10.1002/aenm.201801471

Figure 1 232: Dwyer, D.B.; Lee, D. T.; Boyer, S.; Bernier, W. E.; Parsons, G. N.; Jones, W. E.

Toxic Organophosphate Hydrolysis Using Nanofiber-Templated UiO-66-NH2 Metal–Organic Framework Polycrystalline Cylinders

ACS Applied Materials and Interfaces. 2018 
DOI:10.1021/acsami.8b08167

231: Mousa, M. B. M.; Ovental, J. S.; Brozena, A. H.; Oldham, C. J.; Khan, S. A.; Parsons, G. N. 

Modeling and Experimental Demonstration of High-Throughput Flow-Through Spatial Atomic Layer Deposition of Al2O3 Coatings on Textiles at Atmospheric Pressure

Journal of Vacuum Science and Technology A. 2018 
DOI:10.1116/1.5022077

Figure 1 230: Stevens, E.; Tomczak, Y.; Chan, B. T.; Sanchez, E. A.; Parsons, G. N.; Delabie, A. 

Area-Selective Atomic Layer Deposition of TiN, TiO2, and HfO2 on Silicon Nitride with inhibition on Amorphous Carbon

Chemistry of Materials. 2018 
DOI:10.1021/acs.chemmater.8b00017

Abstract Image 229: Barton, H. F.; Davis, A. K.; Lee, D. T.; Parsons, G. N.

Solvothermal Synthesis of MIL-96 and UiO-66-NH2 on Atomic Layer Deposited Metal Oxide Coatings on Fiber Mats

JoVE. 2018
DOI:10.3791/57734.

Figure 1 228: Xie, W.; Lemaire, P.C.; Parsons, G. N.

Thermally Driven Self-Limiting Atomic Layer Etching of Metallic Tungsten Using WF6 and O2

JACS Applied Materials and Interfaces. 2018 
DOI:10.1021/acsami.7b19024 

2017

Abstract Image 227: Lee, D.T.; Zhao, J.; Oldham, C.J.; Peterson, G.W.;  Parsons G.N.

UiO-66-NH2 Metal-Organic Framework (MOF) Nucleation on TiO2, ZnO2, and Al2O3 Atomic Layer Deposition-Treated Polymer Fibers: Role of Metal Oxide on MOF Growth and Catalytic Hydrolysis of Chemical Warfare Agent Stimulants

ACS Applied Materials and Interfaces. 2017
DOI:10.1021/acsami.7b15397

Abstract Image 226: Zhao, J.; Kalanyan, B.; Barton, H.F.; Sperling, B.A.; Parsons G.N.

In Situ Time-Resolved Attenuated Total Reflectance Infrared Spectroscopy for Probing Metal-Organic Framework Thin Film Growth

Chemistry of Materials. 2017
DOI:10.1021/acs.chemmater.7b03096

Abstract Image 225: Lemaire, P.C.; Parsons, G.N.

Thermal Selective Vapor Etching of TiO2: Chemical Vapor Etching and Self-Limiting Atomic Layer Etching Using WF6 and BCl3

Chemistry of Materials. 2017
DOI:10.1021/acs.chemmater.7b00985

Figure 1 224: Bagal, A; Zhang, X.A.; Shahrin, R.; Dandley, E.C.; Zhao, J.; Poblete, F.R.; Oldham, C.J.; Zhu, Y.; Parsons, G.N.; Bobko, C.; Chang, C.

Large-Area Nanolattice Film with Enhanced Modulus, Hardness, and Energy Dissipation

Scientific Reports. 2017
DOI:10.1038/s41598-017-09521-6

Abstract Image 223: Tripathi, A.; Parsons, G. N.; Rojas, O. J.; Khan, S. A.

Featherlight, Mechanically Robust Cellulose Ester Aerogels for Environmental Remediation

ACS Omega. 2017
DOI:10.1021/acsomega.7b00571

222: Duke, K. S.; Taylor-Just, A. J.; Ihrie, M. D.; Shipkowski, K. A.; Thompson, E. A.; Dandley, E. C.; Parsons, G. N.; Bonner, J. C. 

STAT1-Dependent and -Independent Pulmonary Allergic and Fibrogenic Responses in Mice after Exposure to Tangled versus Rod-like Multi-Walled Carbon Nanotubes

Particle and Fibre Toxicology. 2017
DOI:10.1186/s12989-017-0207-3

Graphical abstract: Intrinsic limitations of atomic layer deposition for pseudocapacitive metal oxides in porous electrochemical capacitor electrodes 221: Daubert, J. S.; Wang, R.; Ovental, J. S.; Barton, H. F.; Rajagopalan, R.; Augustyn, V.; Parsons, G. N.

Intrinsic Limitations of Atomic Layer Deposition for Pseudocapacitive Metal Oxides in Porous Electrochemical Capacitor Electrodes

Journal of Materials Chemistry A. 2017
DOI:10.1039/C7TA02719B

Abstract Image

220: Lemaire, P.C.; Lee, D.T.; Zhao, J.; Parsons, G.N.

Reversible Low-Temperature Metal Node Distortion during Atomic Layer Deposition of Al2O3 and TiO2 on UiO-66-NH2 Metal-Organic Framework Crystal Surfaces

ACS Applied Materials and Interfaces. 2017
DOI:10.1021/acsami.7b05214

Abstract Image

219: Lee, D.T.; Zhao, J.; Peterson, G.W.; Parsons, G.N.

Catalytic “MOF-Cloth” Formed via Directed Supramolecular Assembly of UiO-66-NH2 Crystals on Atomic Layer Deposition-Coated Textiles for Rapid Degradation of Chemical Warfare Agent Stimulants

Chemistry of Materials. 2017
DOI:10.1021/acs.chemmater.7b00949

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218: Hilton, G. M.; Taylor, A. J.; Hussain, S.; Dandley, E. C.; Griffith, E. H.; Garantziotis, S.; Parsons, G. N.; Bonner, J. C.; Bereman, M. S.

Mapping differential cellular protein response of mouse alveolar epithelial cells to multi-walled carbon nanotubes as a function of atomic layer deposition coating

Nanotoxicology. 2017
DOI:10.1080/17435390.2017.1299888

 J.S. Daubert Abstract Media

217: Daubert, J.S.; Hill, G.T.; Gotsch, A.P.; Gremaud, A.P.; Ovental, J.S.; Williams, P.S.; Oldham, C.J.; Parsons, G.N.

Corrosion Protection of Copper Using Al2O3, TiO2, ZnO, HfO2, and ZrO2 Atomic Layer Deposition

ACS Applied Materials and Interfaces. 2017
DOI:10.1021/acsami.6b13571

Figure

216: Lemaire, P.C.; King, M.; Parsons, G.N.

Understanding inherent substrate selectivity during atomic layer deposition: Effect of surface preparation, hydroxyl density, and metal oxide composition on nucleation mechanisms during tungsten ALD

The Journal of Chemical Physics. 2017
DOI:10.1063/1.4967811

2016

Fig 1_2016-04-26

215: Daubert, J. S.; Mundy, J. Z.; Parsons, G. N.

Kevlar-Based Supercapacitor Fibers with Conformal Pseudocapacitive Metal Oxide and Metal Formed by ALD

Advanced Materials Interfaces. 2016

DOI: 10.1002/admi.201600355

Inside front cover of Do Han Kim AMI journal article.

214: Kim, D. H.; Losego, M. D.; Peng, Q.; Parsons, G. N. 

Thin Films: Atomic Layer Deposition for Sensitized Solar Cells: Recent Progress and Prospects.

Advanced Materials Interfaces. 2016 DOI: 10.1002/admi.201670102

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213: Zhao, J.; Lee, D. T.; Yaga, R. W.; Hall, M. G.; Barton, H. F.; Woodward, I. R.; Oldham, C. J.; Walls, H. J; Peterson, G. W.; Parsons, G. N.

Ultra-Fast Degradation of Chemical Warfare Agents Using MOF-Nanofiber Kebabs

Angewandte Chemie. 2016

DOI: 10.1002/anie.201606656

Abstract Image

212: Tovar, T. M.; Zhao, J. J.; Nunn, W. T.; Barton, H. F.; Peterson, G. W.; Parsons, G. N.; Levan, M. D.

Diffusion of CO2 in Large Crystals of Cu-BTC MOF

Journal of American Chemical Society. 2016 DOI: 10.1021/jacs.6b05930

Abstract Image

211: Wang, Z. T.; Zhao, J. J.; Bagal, A.; Dandley, E. C.; Oldham, C. J.; Fang, T. G.; Parsons, G. N.; Chang, C. H.

Wicking Enhancement in Three-Dimensional Hierarchical Nanostructures

Langmuir. 2016 DOI: 10.1021/acs.langmuir.6b01864

Abstract Image

210: Huang, L. J.; Li, G. Q.; Gurarslan, A.; Yu, Y. L.; Kirste, R.; Guo, W.; Zhao, J. J.; Collazo, R.; Sitar, Z.; Parsons, G. N.; Kudenov, M.; Cao, L. Y.

Atomically Thin MoS2 Narrowband and Broadband Light Superabsorbers

ACS Nano. 2016 DOI: 10.1021/acsnano.6b02195

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209: Dandley, E. C.; Taylor, A. J.; Duke, K. S.; Ihrie, M. D.; Shipkowski, K. A.; Parsons, G. N.; Bonner, J.C.

Atomic layer deposition coating of carbon nanotubes with zinc oxide causes acute phase immune responses in human monocytes in vitro and in mice after pulmonary exposure

Particle and Fibre Toxicology. 2016

DOI: 10.1186/s12989-016-0141-9

10.1021-acsami.6b01195Figure1-1

208: Lemaire, P. C.; Zhao, J.; Williams, P. S.; Walls, H. J.; Shepherd, S. D.; Losego, M. D.; Peterson, G. W.; Parsons, G. N.

Copper Benzenetricarboxylate Metal–Organic Framework Nucleation Mechanisms on Metal Oxide Powders and Thin Films formed by Atomic Layer Deposition

ACS Applied Materials and Interfaces. 2016 DOI: 10.1021/acsami.6b01195

image

207: Dandley, E.C.; Lemaire, P.C.; Zhu, Z.; Yoon, A.; Sheet, L.; Parsons, G.N.

Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates

Advanced Materials Interfaces. 2016

DOI: 10.1002/admi.201601178

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206: Kalanyan, B.; Lemaire, P. C.; Atanasov, S. E.; Ritz, M. J.; Parsons, G. N.

Using Hydrogen to Expand the Inherent Substrate Selectivity Window During Tungsten Atomic Layer Deposition

Chem.Mat. 2016

DOI: 10.1021/acs.chemmater.5b03319

1.4938481.figures.online.f8

205: Atanasov, S. A.; Kalanyan, B.; Parsons, G. N.

Inherent substrate-dependent growth initiation and selective-area atomic layer deposition of TiO2 using “water-free” metal-halide/metal alkoxide reactants

J.Vac.Sci.&Technol. A 34, 01A148 2016

DOI: 10.1116/1.493848

1.4938104.figures.online.f3

204: Brozena, A. H.; Oldham, C. J.; Parsons, G. N.

Atomic Layer Deposition on Polymer Fibers and Fabrics for Multifunctional and Electronic Textiles

J.Vac.Sci.&Technol.A, 34 2016 DOI:10.1116/1.4938104

1.4937222.figures.online.f12

203: Lemaire, P. C.; Oldham, C. J.; Parsons, G. N.

Rapid Visible Color Change and Physical Swelling During Water Exposure in Triethanolamine-Metalcone Films Formed by Molecular Layer Deposition

J.Vac.Sci.&Technol.A 34, 01A134 2016

DOI: 10.1116/1.4937222

1.4935448.figures.online.f1

202: Mundy, J. Z.; Shafiefarhood, A.; Li, F.; Khan, S.A.; and Parsons, G. N.

Low temperature Pt-ALD on nylon-6 for highly conductive and catalytic fiber mats

J.Vac.Sci.&Technol.A 34, 2016 DOI:10.1116/1.4935448

Capture

201: Min J-H.; Bagal A.; Mundy J. Z.; Oldham C. J.; Wu B-I.; Parsons G. N.;Chang C-H.

Fabrication and Design of Metal Nano-Accordion Structures Using Atomic Layer Deposition and Interference Lithography

Nanoscale. 2016

DOI: 10.1039/C5NR08566G