Publications

2023

2022

2021

2020

2019

2018

2017

2016

2015

2014

2013

2012

2011

2010 and Earlier

2023

	281: Saare, H.; Xie, W. Y.; Parsons, G. N. Comparison of BCl3, TiCl4, and SOCl2 chlorinating agents for atomic layer etching of TiO2 and ZrO2 using tungsten hexafluoride J. Vac. Sci. Technol. 2023 DOI: 10.1116/6.0002708
	280: Nye, R. A.; Van Dongen, K.; de Marneffe, J.; Parsons, G. N.; Delabie, A. Quantified Uniformity and Selectivity of TiO2 Films in 45-nm Half Pitch Patterns Using Area-Selective Deposition Supercycles Adv. Mater. Interfaces 2023 DOI: 10.1002/admi.202300163
	279: Hsain, H. A.; Lee, Y.; Lomenzo, P. D.; Alcala, R.; Xu, B.; Mikolajick, T.; Schroeder, U.; Parsons, G. N.; Jones, J. L. Wake-up free ferroelectric hafnia-zirconia capacitors fabricated via vacuum-maintaining atomic layer deposition J. Appl. Phys. 2023 DOI: 10.1063/5.0147124
	278: Oh, H.; Kim, J. S.; Margavio, H. R. M.; Parsons, G. N. Self-Aligned Nanopatterning and Controlled Lateral Growth by Dual-Material Orthogonal Area-Selective Deposition of Poly(3,4-ethylenedioxythiophene) and Tungsten Chem. Mater. 2023 DOI: 10.1021/acs.chemmater.3c00530
	277: Keller, N. D.; Vecchi, P.; Grills, D. C.; Polyansky, D. E.; Bein, G. P.; Dempsey, J. L.; Cahoon, J. F.; Parsons, G. N.; Sampaio, R. N.; Meyer, G. J. Multi-Electron Transfer at H-Terminated p-Si Electrolyte Interfaces: Large Photovoltages under Inversion Conditions J. Am. Chem. Soc. 2023 DOI: 10.1021/jacs.3c01990
	276: Clerix, J. J.; Dianat, G.; Delabie, A.; Parsons, G. N. In situ analysis of nucleation reactions during TiCl4/H2O atomic layer deposition on SiO2 and H-terminated Si surfaces treated with a silane small molecule inhibitor J. Vac. Sci. 2023 DOI: 10.1116/6.0002493
	275: Hsain, H. A.; Lee, Y.; Lancaster, S.; Lomenzo, P. D.; Xu, B.; Mikolajick, T.; Schroeder, U.; Parsons, G. N.; Jones, J. L. Reduced fatigue and leakage of ferroelectric TiN/Hf0.5Zr0.5O2/TiN capacitors by thin alumina interlayers at the top or bottom interface Nanotechnology. 2023 DOI: 10.1088/1361-6528/acad0a
	274: Nye, R. A.; Van Dongen, K.; De Simone, D.; Oka, H.; Parsons, G. N.; Delabie, A. Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition Chem. Mater. 2023 DOI: 10.1021/acs.chemmater.2c03404

2022

	273: Lee, Y.; Broughton, R. A.; Hsain, H. A.; Song, S. K.; Edgington, P. G.; Horgan, M. D.; Dowden, A.; Bednar, A.; Lee, D. H.; Parsons, G. N.; Park, M. H.; Jones, J. L. The influence of crystallographic texture on structural and electrical properties in ferroelectric Hf0.5Zr0.5O2 J. Appl. Phys. 2022 DOI: 10.1063/5.0128038
	272: Kim, J.; Oh, H.; Parsons, G. N. Growth behavior and substrate selective deposition of polypyrrole, polythiophene, and polyaniline by oxidative chemical vapor deposition and molecular layer deposition J. Vac. Sci. Technol. 2022 DOI: 10.1116/6.0002036
	271: Morgan, S. E.; Willis, M. L.; Dianat, G.; Peterson, G. W.; Mahle, J. J.; Parsons, G. N. Toxin-Blocking Textiles: Rapid, Benign, Roll-to-Roll Production of Robust MOF-Fabric Composites for Organophosphate Separation and Hydrolysis ChemSusChem 2022 DOI: 10.1002/cssc.202201744
	270: Hsain, H. A.; Lee, Y. H.; Lancaster, S.; Materano, M.; Alcala, R.; Xu, B. H.; Mikolajick, T.; Schroeder, U.; Parsons, G. N.; Jones, J. L. Role of Oxygen Source on Buried Interfaces in Atomic-Layer Deposited Ferroelectric Hafnia-Zirconia Thin Films ACS Appl. Mater. Interfaces 2022 DOI: 10.1021/acsami.2c11073
	269: Gu, H.; Lee, D. T.; Corkery, P.; Miao, Y.; Kim, S. K., Yuan, Y.; Xu, Z.; Dai, G.; Parsons, G. N.; Kevrekidis, I. G.; Zhuang, L.; Tsapatsis, M. Modeling of deposit formation in mesoporous substrates via atomic layer deposition: Insights from pore-scale simulation AIChE J 2022 DOI: 10.1002/aic.17889
	268: Nye, R. A.; Song, S. K.; Dongen, K. V.; Delabie, A.; Parsons, G. N. Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition Appl. Phys. Lett. 2022 DOI: 10.1016/j.apmt.2022.101517
	267: Wang, S. Y.; Pirzada, T.; Xie, W. Y.; Barbieri, E.; Hossian, O.; Opperman, C. H.; Pal, L.; Wei, Q. S.; Parsons, G. N.; Khan, S. A. Creating hierarchically porous banana paper-metal organic framework (MOF) composites with multifunctionality Appl. Mater. Today 2022 DOI: 10.1016/j.apmt.2022.101517
	266: Saare, H.; Dianat, G.; Parsons, G. N. Comparative In Situ Study of the Initial Growth Trends of Atomic Layer-Deposited Al(2)O(3) Films J. Phys. Chem. C. 2022 DOI: 10.1021/acs.jpcc.2c01033
	265: Morgan, S.; Willis, M.; Peterson, G.; Mahle, J.; Parsons, G. N. Green MOF-Fabrics: Benign, Scalable Sorption-Vapor Synthesis of Catalytic Composites to Protect against Phosphorus-Based Toxins Appl. Mater. Today 2022 DOI: 10.1021/acssuschemeng.1c07512
	264: Lee, D. T.; Zijian, D.; Peterson, G. W.; Hall, M. G.; Pomerantz, N. L.; Hoffman, N.; Parsons, G. N.; Jones, J. L. Highly Breathable Chemically-Protective MOF-Fiber Catalysts Adv. Funct. Mater. 2022 DOI: 10.1002/adfm.202108004
	263: Nye, R. A.; Wang, S. Y.; Uhlenbrock, S.; Smythe, J.A.; Parsons, G. N. In situ analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors Dalton Trans. 2022 DOI: 10.1039/d1dt03689k
	262: Hsain, H. A.; Lee, Y.; Materano, M.; Mittmann, T.; Payne, A.; Mikolajick, T.; Schroeder, U. Parsons, G. N.; Jones, J. L. Many routes to ferroelectric HfO2: A review of current deposition methods J. Vac. Sci. Technol. 2022 DOI: 10.1116/6.0001317

2021

	261: Kim, J. S.; Parsons, G.N. Nanopatterned Area-Selective Vapor Deposition of PEDOT on SiO2 vs Si-H: Improved Selectivity Using Chemical Vapor Deposition vs Molecular Layer Deposition Chem Mater. 2021 DOI: 10.1021/acs.chemmater.1c02842
	260: Limbu, T. B.; Adhikari, B.; Song, S.K.; Chitara, B.; Tang, Y. G.; Parsons, G. N.; Yan, F. Toward understanding the phase-selective growth mechanism of films and geometrically-shaped flakes of 2D MoTe2 RSC Adv.. 2021 DOI: 10.1039/d1ra07787b
	259: Dai, Z. J.; Pradeep, S.; Zhu, J.; Xie, W. Y.; Barton, H.F.; Si, Y.; Ding, B.; Yu, J. Y.; Parsons, G. N. Freestanding Metal Organic Framework-Based Multifunctional Membranes Fabricated via Pseudomorphic Replication toward Liquid- and Gas-Hazards Abatement Adv. Mater. Interfaces. 2021 DOI: 10.1002/admi.202101178
	258: Chen, I.T; Dai, Z.J.; Chen, Y. A.; Parsons, G. N.; Chang, C. H. Fabrication of Non-Uniform Nanolattices with Spatially Varying Geometry and Material Composition Adv. Mater. Interfaces. 2021 DOI: 10.1002/admi.202100690
	257: Song, S.K.; Kim, J.; Margavio, H.; Parsons, G.N. Multi-Material Self-Aligned Nano-Patterning by Simultaneous Adjacent Thin Film Deposition and Etching ACS Nano. 2021 DOI: 10.1021/acsnano.1c04086
	256: Morgan, S.; O’Connell, A.; Jansson, A.; Peterson, G.; Mahle, J.; Eldred, T.; Gao, W.; Parsons, G. N. Stretchable and multi-MOF fabrics via high-yield rapid sorption-vapor synthesis, and application to chemical warfare agent hydrolysis ACS Appl. Mater. Interfaces. 2021 DOI: 10.1021/acsami.1c07366
	255: Peterson, G. W.; Lee, D. T.; Barton, H. F.; Epps, T. H.; Parsons, G. N. Fibre-based composites from the integration of metal-organic frameworks and polymers Nat. Rev. Mater. 2021 DOI: 10.1038/s41578-021-00291-2
	254: Volk, A. A.; Kim, J. S.; Jamir, J.; Dickey, E. C.; Parsons, G. N. Oxidative molecular layer deposition of PEDOT using volatile antimony(V) chloride oxidant J. Vac. Sci. Technol. 2021 DOI: 10.1116/6.0000791
	253: Barton, H. F.; Jamir, J. D.; Davis, A. K.; Peterson, G. W.; Parsons, G. N. Doubly Protective MOF-Photo-Fabrics: Facile Template-Free Synthesis of PCN-222-Textiles Enables Rapid Hydrolysis, Photo-Hydrolysis and Selective Oxidation of Multiple Chemical Warfare Agents and Simulants Eur. J. Chem.. 2021 DOI: 10.1002/chem.202003716
	252: Lee, Y.; Hsain, H. A.; Fields, S.S.; Jaszewski, S. T.; Horgan, M. D.; Edgington, P.G.; Ihlefeld, J.F.; Parsons, G. N.; Jones, J. L. Unexpectedly large remanent polarization of Hf0.5Zr0.5O2 metal-ferroelectric-metal capacitor fabricated without breaking vacuum Appl. Phys. Lett. 2021 DOI: 10.1063/5.0029532

2020

	251: Saare, H.; Song, S.K.; Kim, J.; Parsons, G.N. Effect of Reactant Dosing on Selectivity during Area-Selective Deposition of TiO2 via Integrated Atomic Layer Deposition and Atomic Layer Etching Journal Of Applied Physics. 2020 DOI: 10.1063/5.0013552
	250: Dai, Z.; Zhu, J.; Yan, J.; Su, J.; Gao, Y.; Zhang, X.; Ke, Q.; Parsons, G. N. An Advanced Dual‐Function MnO2‐Fabric Air Filter Combining Catalytic Oxidation of Formaldehyde and High‐Efficiency Fine Particulate Matter Removal Advanced Functional Materials. 2020 DOI: 10.1002/adfm.202001488
	249: Wang, S.; Pomerantz, N. L.; Dai, Z.; Xie, W.; Anderson, E. E.; Miller, T.; Khan, S. A.; Parsons, G. N. Polymer of intrinsic microporosity (PIM) based fibrous mat: combining particle filtration and rapid catalytic hydrolysis of chemical warfare agent simulants into a highly sorptive, breathable, and mechanically robust fiber matrix Materials Today Advances. 2020 DOI: 10.1016/j.mtadv.2020.100085
	248: Parsons, G. N.; Clark, R.D. Area Selective Deposition: Fundamentals, Applications and Future Outlook Chemistry Of Materials. 2020 DOI: 10.1021/acs.chemmater.0c00722
	247: Wang, S.; Shi, K.; Tripathi, A.; Chakraborty, U.; Parsons, G. N.; Khan, S. Designing Intrinsically Microporous Polymer (PIM-1) Microfibers with Tunable Morphology and Porosity via Controlling Solvent/Nonsolvent/Polymer Interactions ACS Applied Polymer Materials. 2020 DOI: 10.1021/acsapm.0c00386
	246: Barton, H.F.; Davis, A.; Parsons, G. N. The effect of surface hydroxylation on MOF formation on ALD metal oxides: MOF-525 on TiO2/polypropylene for catalytic hydrolysis of chemical warfare agent simulants ACS Applied Materials and Interfaces. 2020 DOI: 10.1021/acsami.9b20910
	245: Dai, Z.; Lee, D. T.; Shi, K.; Wang, S.; Barton, H. F.; Zhu, J.; Yan, J.; Ke, Q.; Parsons, G. N. Fabrication of Freestanding Metal Organic Framework Predominant Hollow Fiber Mat and Its Potential Applications in Gas Separation and Catalysis Journal of Materials Chemistry A. 2020 DOI: 10.1039/C9TA11701F
	244: Nye, R. A.; Kelliher, A.; Gaskins, J.; Hopkins, P.; Parsons, G. N. Understanding Molecular Layer Deposition Growth Mechanisms in Polyurea via Picosecond Acoustics Analysis Chemistry of Materials. 2020 DOI: 10.1021/acs.chemmater.9b0472
	243: Xie, Wenyi; Parsons, G. N. Thermal atomic layer etching of metallic tungsten via oxidation and etch reaction mechanism using O₂or O₃for oxidation and WCl₆ as thechlorinating etchant Journal of Vacuum Science and Technology A. 2020 DOI: 10.1116/1.5134430

2019

	242: Lee, D. T.; Parsons, G. N. Protective Fabrics: Metal-Organic Framework Textiles for Rapid Photocatalytic Sulfur Mustard Simulant Detoxification Matter. 2019 DOI: 10.1016/j.matt.2019.11.005
	241: Hill, G. T.; Lee, D. T.; Williams, P. S.; Needham, C. D.; Dandley, E. C.; Oldham, C. J.; Parsons, G. N. Insight on the Sequential Vapor Infiltration Mechanisms of Trimethylaluminum with Poly(methyl methacrylate), Poly(vinylpyrrolidone), and Poly(acrylic acid) J. Phys Chem. C. 2019 DOI: 10.1021/acs.jpcc.9b02153
	240: Song, S. K.; Saare, H.; Parsons, G. N. Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Super-Cycles for Area-Selective Deposition of TiO Chemistry of Materials. 2019 DOI: 10.1021/acs.chemmater.9b01143
	239: Fusco, M. A.; Oldham, C. J.; Parsons, G. N. Investigation of the Corrosion Behavior of Atomic Layer Deposited Al2O3/TiO2 Nanolaminate Thin Films on Copper in 0.1 M NaCl Materials. 2019 DOI: 10.3390/ma12040672
	238: Parsons, G. N. Functional model for analysis of ALD nucleation and quantification of area-selective deposition Journal of Vacuum Science and Technology A. 2019 DOI: 10.1116/1.5054285

2018

	237: Lee, D. T.; Jamir, J. D.; Peterson, G. W.; Parsons, G. N. Water-Stable Chemical-Protective Textiles viz Euhedral Surface-Oriented 2D Cu-TCPP Metal-Organic Frameworks Small. 2018 DOI: 10.1002/smll.201805133
	236: Stevens, E. C.; Mousa, M. M.; Parsons, G. N. Thermal Atomic Layer Deposition of Sn Metal Using SnCl4 and a Vapor Phase Silyl Dihydropyrazine Reducing Agent Journal of Vacuum Science and Technology A. 2018 DOI:10.1116/1.5055212
	235: King, M.X.; Theofanis, P.; Lemaire, P.C.; Santiso, E.; Parsons, G. N. Ab initio Analysis of Nucleation Reactions during Tungsten Atomic Layer Deposition on Si(100) and W(110) Substrates Journal of Vacuum Science and Technology A. 2018 DOI:10.1116/1.5044740
	234: Xie, W.; Khan, S. A.; Rojas, O. J.; Parsons, G. N. Control of Micro- and Mesopores in Carbon Nanofibers and Hollow Carbon Nanofibers Derived from Cellulose Diacetate via Vapor Phase Infiltration of Diethyl Zinc ACS Sustainable Chemistry & Engineering. 2018 DOI:10.1021/acssuschemeng.8b02014
	233: Cui, K.; Lemaire, P. C.; Zhao, H.; Savas, T.; Parsons, G. N.; Hart, A.J. Tungsten-Carbon Nanotube Composite Photonic Crystals as Thermally Stable Spectral-Selective Absorbers and Emitters for Thermophotovoltaics Advanced Energy Materials. 2018 DOI:10.1002/aenm.201801471
	232: Dwyer, D.B.; Lee, D. T.; Boyer, S.; Bernier, W. E.; Parsons, G. N.; Jones, W. E. Toxic Organophosphate Hydrolysis Using Nanofiber-Templated UiO-66-NH2 Metal–Organic Framework Polycrystalline Cylinders ACS Applied Materials and Interfaces. 2018 DOI:10.1021/acsami.8b08167
	231: Mousa, M. B. M.; Ovental, J. S.; Brozena, A. H.; Oldham, C. J.; Khan, S. A.; Parsons, G. N. Modeling and Experimental Demonstration of High-Throughput Flow-Through Spatial Atomic Layer Deposition of Al2O3 Coatings on Textiles at Atmospheric Pressure Journal of Vacuum Science and Technology A. 2018 DOI:10.1116/1.5022077
	230: Stevens, E.; Tomczak, Y.; Chan, B. T.; Sanchez, E. A.; Parsons, G. N.; Delabie, A. Area-Selective Atomic Layer Deposition of TiN, TiO2, and HfO2 on Silicon Nitride with inhibition on Amorphous Carbon Chemistry of Materials. 2018 DOI:10.1021/acs.chemmater.8b00017
	229: Barton, H. F.; Davis, A. K.; Lee, D. T.; Parsons, G. N. Solvothermal Synthesis of MIL-96 and UiO-66-NH₂ on Atomic Layer Deposited Metal Oxide Coatings on Fiber Mats JoVE. 2018 DOI:10.3791/57734.
	228: Xie, W.; Lemaire, P.C.; Parsons, G. N. Thermally Driven Self-Limiting Atomic Layer Etching of Metallic Tungsten Using WF₆ and O₂ JACS Applied Materials and Interfaces. 2018 DOI:10.1021/acsami.7b19024

2017

	227: Lee, D.T.; Zhao, J.; Oldham, C.J.; Peterson, G.W.; Parsons G.N. UiO-66-NH2 Metal-Organic Framework (MOF) Nucleation on TiO2, ZnO2, and Al2O3 Atomic Layer Deposition-Treated Polymer Fibers: Role of Metal Oxide on MOF Growth and Catalytic Hydrolysis of Chemical Warfare Agent Stimulants ACS Applied Materials and Interfaces. 2017 DOI:10.1021/acsami.7b15397
	226: Zhao, J.; Kalanyan, B.; Barton, H.F.; Sperling, B.A.; Parsons G.N. In Situ Time-Resolved Attenuated Total Reflectance Infrared Spectroscopy for Probing Metal-Organic Framework Thin Film Growth Chemistry of Materials. 2017 DOI:10.1021/acs.chemmater.7b03096
	225: Lemaire, P.C.; Parsons, G.N. Thermal Selective Vapor Etching of TiO2: Chemical Vapor Etching and Self-Limiting Atomic Layer Etching Using WF6 and BCl3 Chemistry of Materials. 2017 DOI:10.1021/acs.chemmater.7b00985
	224: Bagal, A; Zhang, X.A.; Shahrin, R.; Dandley, E.C.; Zhao, J.; Poblete, F.R.; Oldham, C.J.; Zhu, Y.; Parsons, G.N.; Bobko, C.; Chang, C. Large-Area Nanolattice Film with Enhanced Modulus, Hardness, and Energy Dissipation Scientific Reports. 2017 DOI:10.1038/s41598-017-09521-6
	223: Tripathi, A.; Parsons, G. N.; Rojas, O. J.; Khan, S. A. Featherlight, Mechanically Robust Cellulose Ester Aerogels for Environmental Remediation ACS Omega. 2017 DOI:10.1021/acsomega.7b00571
	222: Duke, K. S.; Taylor-Just, A. J.; Ihrie, M. D.; Shipkowski, K. A.; Thompson, E. A.; Dandley, E. C.; Parsons, G. N.; Bonner, J. C. STAT1-Dependent and -Independent Pulmonary Allergic and Fibrogenic Responses in Mice after Exposure to Tangled versus Rod-like Multi-Walled Carbon Nanotubes Particle and Fibre Toxicology. 2017 DOI:10.1186/s12989-017-0207-3
	221: Daubert, J. S.; Wang, R.; Ovental, J. S.; Barton, H. F.; Rajagopalan, R.; Augustyn, V.; Parsons, G. N. Intrinsic Limitations of Atomic Layer Deposition for Pseudocapacitive Metal Oxides in Porous Electrochemical Capacitor Electrodes Journal of Materials Chemistry A. 2017 DOI:10.1039/C7TA02719B
	220: Lemaire, P.C.; Lee, D.T.; Zhao, J.; Parsons, G.N. Reversible Low-Temperature Metal Node Distortion during Atomic Layer Deposition of Al2O3 and TiO2 on UiO-66-NH2 Metal-Organic Framework Crystal Surfaces ACS Applied Materials and Interfaces. 2017 DOI:10.1021/acsami.7b05214
	219: Lee, D.T.; Zhao, J.; Peterson, G.W.; Parsons, G.N. Catalytic “MOF-Cloth” Formed via Directed Supramolecular Assembly of UiO-66-NH2 Crystals on Atomic Layer Deposition-Coated Textiles for Rapid Degradation of Chemical Warfare Agent Stimulants Chemistry of Materials. 2017 DOI:10.1021/acs.chemmater.7b00949
	218: Hilton, G. M.; Taylor, A. J.; Hussain, S.; Dandley, E. C.; Griffith, E. H.; Garantziotis, S.; Parsons, G. N.; Bonner, J. C.; Bereman, M. S. Mapping differential cellular protein response of mouse alveolar epithelial cells to multi-walled carbon nanotubes as a function of atomic layer deposition coating Nanotoxicology. 2017 DOI:10.1080/17435390.2017.1299888
	217: Daubert, J.S.; Hill, G.T.; Gotsch, A.P.; Gremaud, A.P.; Ovental, J.S.; Williams, P.S.; Oldham, C.J.; Parsons, G.N. Corrosion Protection of Copper Using Al2O3, TiO2, ZnO, HfO2, and ZrO2 Atomic Layer Deposition ACS Applied Materials and Interfaces. 2017 DOI:10.1021/acsami.6b13571
	216: Lemaire, P.C.; King, M.; Parsons, G.N. Understanding inherent substrate selectivity during atomic layer deposition: Effect of surface preparation, hydroxyl density, and metal oxide composition on nucleation mechanisms during tungsten ALD The Journal of Chemical Physics. 2017 DOI:10.1063/1.4967811