2010 and Earlier


281: Saare, H.; Xie, W. Y.; Parsons, G. N.

Comparison of BCl3, TiCl4, and SOCl2 chlorinating agents for atomic layer etching of TiO2 and ZrO2 using tungsten hexafluoride

J. Vac. Sci. Technol. 2023 
DOI: 10.1116/6.0002708

280: Nye, R. A.; Van Dongen, K.; de Marneffe, J.; Parsons, G. N.; Delabie, A.

Quantified Uniformity and Selectivity of TiO2 Films in 45-nm Half Pitch Patterns Using Area-Selective Deposition Supercycles

Adv. Mater. Interfaces 2023 
DOI: 10.1002/admi.202300163

279: Hsain, H. A.; Lee, Y.; Lomenzo, P. D.; Alcala, R.; Xu, B.; Mikolajick, T.; Schroeder, U.; Parsons, G. N.; Jones, J. L.

Wake-up free ferroelectric hafnia-zirconia capacitors fabricated via vacuum-maintaining atomic layer deposition

J. Appl. Phys. 2023 
DOI: 10.1063/5.0147124

278: Oh, H.; Kim, J. S.; Margavio, H. R. M.; Parsons, G. N. 

Self-Aligned Nanopatterning and Controlled Lateral Growth by Dual-Material Orthogonal Area-Selective Deposition of Poly(3,4-ethylenedioxythiophene) and Tungsten

Chem. Mater. 2023 
DOI: 10.1021/acs.chemmater.3c00530

277: Keller, N. D.; Vecchi, P.; Grills, D. C.; Polyansky, D. E.; Bein, G. P.; Dempsey, J. L.; Cahoon, J. F.; Parsons, G. N.; Sampaio, R. N.; Meyer, G. J.

Multi-Electron Transfer at H-Terminated p-Si Electrolyte Interfaces: Large Photovoltages under Inversion Conditions

J. Am. Chem. Soc. 2023 
DOI: 10.1021/jacs.3c01990


276: Clerix, J. J.; Dianat, G.; Delabie, A.; Parsons, G. N. 

In situ analysis of nucleation reactions during TiCl4/H2O atomic layer deposition on SiO2 and H-terminated Si surfaces treated with a silane small molecule inhibitor

J. Vac. Sci. 2023 
DOI: 10.1116/6.0002493

275: Hsain, H. A.; Lee, Y.; Lancaster, S.; Lomenzo, P. D.; Xu, B.; Mikolajick, T.; Schroeder, U.; Parsons, G. N.; Jones, J. L.

Reduced fatigue and leakage of ferroelectric TiN/Hf0.5Zr0.5O2/TiN capacitors by thin alumina interlayers at the top or bottom interface

Nanotechnology. 2023 
DOI: 10.1088/1361-6528/acad0a

274: Nye, R. A.; Van Dongen, K.; De Simone, D.; Oka, H.; Parsons, G. N.; Delabie, A.

Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition

Chem. Mater. 2023
DOI: 10.1021/acs.chemmater.2c03404


273: Lee, Y.; Broughton, R. A.; Hsain, H. A.; Song, S. K.; Edgington, P. G.; Horgan, M. D.; Dowden, A.; Bednar, A.; Lee, D. H.; Parsons, G. N.; Park, M. H.; Jones, J. L.

The influence of crystallographic texture on structural and electrical properties in ferroelectric Hf0.5Zr0.5O2

J. Appl. Phys. 2022 
DOI: 10.1063/5.0128038

272: Kim, J.; Oh, H.; Parsons, G. N.

Growth behavior and substrate selective deposition of polypyrrole, polythiophene, and polyaniline by oxidative chemical vapor deposition and molecular layer deposition

J. Vac. Sci. Technol. 2022 
DOI: 10.1116/6.0002036

271: Morgan, S. E.; Willis, M. L.; Dianat, G.; Peterson, G. W.; Mahle, J. J.; Parsons, G. N.

Toxin-Blocking Textiles: Rapid, Benign, Roll-to-Roll Production of Robust MOF-Fabric Composites for Organophosphate Separation and Hydrolysis

ChemSusChem 2022 
DOI: 10.1002/cssc.202201744

270: Hsain, H. A.; Lee, Y. H.; Lancaster, S.; Materano, M.; Alcala, R.; Xu, B. H.; Mikolajick, T.; Schroeder, U.; Parsons, G. N.; Jones, J. L.

Role of Oxygen Source on Buried Interfaces in Atomic-Layer Deposited Ferroelectric Hafnia-Zirconia Thin Films

ACS Appl. Mater. Interfaces 2022 
DOI: 10.1021/acsami.2c11073

269: Gu, H.; Lee, D. T.; Corkery, P.; Miao, Y.; Kim, S. K., Yuan, Y.; Xu, Z.; Dai, G.; Parsons, G. N.; Kevrekidis, I. G.; Zhuang, L.; Tsapatsis, M.

Modeling of deposit formation in mesoporous substrates via atomic layer deposition: Insights from pore-scale simulation

AIChE J 2022 
DOI: 10.1002/aic.17889

268: Nye, R. A.; Song, S. K.; Dongen, K. V.; Delabie, A.; Parsons, G. N.

Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition

Appl. Phys. Lett. 2022 
DOI: 10.1016/j.apmt.2022.101517

267: Wang, S. Y.; Pirzada, T.; Xie, W. Y.; Barbieri, E.; Hossian, O.; Opperman, C. H.; Pal, L.; Wei, Q. S.; Parsons, G. N.; Khan, S. A.

Creating hierarchically porous banana paper-metal organic framework (MOF) composites with multifunctionality

Appl. Mater. Today 2022 
DOI: 10.1016/j.apmt.2022.101517

266: Saare, H.; Dianat, G.; Parsons, G. N.

Comparative In Situ Study of the Initial Growth Trends of Atomic Layer-Deposited Al(2)O(3) Films

J. Phys. Chem. C. 2022
DOI: 10.1021/acs.jpcc.2c01033

265: Morgan, S.; Willis, M.; Peterson, G.; Mahle, J.; Parsons, G. N.

Green MOF-Fabrics: Benign, Scalable Sorption-Vapor Synthesis of Catalytic Composites to Protect against Phosphorus-Based Toxins

Appl. Mater. Today 2022 
DOI: 10.1021/acssuschemeng.1c07512

264: Lee, D. T.; Zijian, D.; Peterson, G. W.; Hall, M. G.; Pomerantz, N. L.; Hoffman, N.; Parsons, G. N.; Jones, J. L.

Highly Breathable Chemically-Protective MOF-Fiber Catalysts
Adv. Funct. Mater. 2022 

DOI: 10.1002/adfm.202108004

263: Nye, R. A.; Wang, S. Y.; Uhlenbrock, S.; Smythe, J.A.; Parsons, G. N.

In situ analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors

Dalton Trans. 2022 
DOI: 10.1039/d1dt03689k

262: Hsain, H. A.; Lee, Y.; Materano, M.; Mittmann, T.; Payne, A.; Mikolajick, T.; Schroeder, U. Parsons, G. N.; Jones, J. L.

Many routes to ferroelectric HfO2: A review of current deposition methods

J. Vac. Sci. Technol. 2022 
DOI: 10.1116/6.0001317


261: Kim, J. S.; Parsons, G.N.
Nanopatterned Area-Selective Vapor Deposition of PEDOT on SiO2 vs Si-H: Improved Selectivity Using Chemical Vapor Deposition vs Molecular Layer Deposition
Chem Mater. 2021
DOI: 10.1021/acs.chemmater.1c02842
260: Limbu, T. B.; Adhikari, B.; Song, S.K.; Chitara, B.; Tang, Y. G.; Parsons, G. N.; Yan, F.

Toward understanding the phase-selective growth mechanism of films and geometrically-shaped flakes of 2D MoTe2

RSC Adv.. 2021 
DOI: 10.1039/d1ra07787b

259: Dai, Z. J.; Pradeep, S.; Zhu, J.; Xie, W. Y.; Barton, H.F.; Si, Y.; Ding, B.; Yu, J. Y.; Parsons, G. N.

Freestanding Metal Organic Framework-Based Multifunctional Membranes Fabricated via Pseudomorphic Replication toward Liquid- and Gas-Hazards Abatement

Adv. Mater. Interfaces. 2021 
DOI: 10.1002/admi.202101178

258: Chen, I.T; Dai, Z.J.; Chen, Y. A.; Parsons, G. N.; Chang, C. H.

Fabrication of Non-Uniform Nanolattices with Spatially Varying Geometry and Material Composition 

Adv. Mater. Interfaces. 2021 
DOI: 10.1002/admi.202100690

257: Song, S.K.; Kim, J.; Margavio, H.; Parsons, G.N.

Multi-Material Self-Aligned Nano-Patterning by Simultaneous Adjacent Thin Film Deposition and Etching

ACS Nano. 2021
DOI: 10.1021/acsnano.1c04086

256: Morgan, S.; O’Connell, A.; Jansson, A.; Peterson, G.; Mahle, J.; Eldred, T.; Gao, W.; Parsons, G. N.

Stretchable and multi-MOF fabrics via high-yield rapid sorption-vapor synthesis, and application to chemical warfare agent hydrolysis

ACS Appl. Mater. Interfaces. 2021 
DOI: 10.1021/acsami.1c07366

255: Peterson, G. W.; Lee, D. T.; Barton, H. F.; Epps, T. H.; Parsons, G. N.

Fibre-based composites from the integration of metal-organic frameworks and polymers

Nat. Rev. Mater. 2021 
DOI: 10.1038/s41578-021-00291-2

254: Volk, A. A.; Kim, J. S.; Jamir, J.; Dickey, E. C.; Parsons, G. N. 

Oxidative molecular layer deposition of PEDOT using volatile antimony(V) chloride oxidant

J. Vac. Sci. Technol. 2021 
DOI: 10.1116/6.0000791

253: Barton, H. F.; Jamir, J. D.; Davis, A. K.; Peterson, G. W.; Parsons, G. N.

Doubly Protective MOF-Photo-Fabrics: Facile Template-Free Synthesis of PCN-222-Textiles Enables Rapid Hydrolysis, Photo-Hydrolysis and Selective Oxidation of Multiple Chemical Warfare Agents and Simulants

Eur. J. Chem.. 2021 
DOI: 10.1002/chem.202003716

252: Lee, Y.; Hsain, H. A.; Fields, S.S.; Jaszewski, S. T.; Horgan, M. D.; Edgington, P.G.; Ihlefeld, J.F.; Parsons, G. N.; Jones, J. L.

Unexpectedly large remanent polarization of Hf0.5Zr0.5O2 metal-ferroelectric-metal capacitor fabricated without breaking vacuum

Appl. Phys. Lett. 2021 
DOI: 10.1063/5.0029532


251: Saare, H.; Song, S.K.; Kim, J.; Parsons, G.N.

Effect of Reactant Dosing on Selectivity during Area-Selective Deposition of TiO2 via Integrated Atomic Layer Deposition and Atomic Layer Etching

Journal Of Applied Physics. 2020
DOI: 10.1063/5.0013552

250: Dai, Z.; Zhu, J.; Yan, J.; Su, J.; Gao, Y.;  Zhang, X.; Ke, Q.; Parsons, G. N.

An Advanced Dual‐Function MnO2‐Fabric Air Filter Combining Catalytic Oxidation of Formaldehyde and High‐Efficiency Fine Particulate Matter Removal

Advanced Functional Materials. 2020 
DOI: 10.1002/adfm.202001488

Scheme 1 249: Wang, S.; Pomerantz, N. L.; Dai, Z.; Xie, W.; Anderson, E. E.; Miller, T.; Khan, S. A.; Parsons, G. N.

Polymer of intrinsic microporosity (PIM) based fibrous mat: combining particle filtration and rapid catalytic hydrolysis of chemical warfare agent simulants into a highly sorptive, breathable, and mechanically robust fiber matrix

Materials Today Advances. 2020 
DOI: 10.1016/j.mtadv.2020.100085

Abstract Image 248: Parsons, G. N.; Clark, R.D.

Area Selective Deposition: Fundamentals, Applications and Future Outlook

Chemistry Of Materials. 2020 
DOI: 10.1021/acs.chemmater.0c00722

Abstract Image 247: Wang, S.; Shi, K.; Tripathi, A.; Chakraborty, U.; Parsons, G. N.; Khan, S.

Designing Intrinsically Microporous Polymer (PIM-1) Microfibers with Tunable Morphology and Porosity via Controlling Solvent/Nonsolvent/Polymer Interactions

ACS Applied Polymer Materials. 2020 
DOI: 10.1021/acsapm.0c00386

Abstract Image 246: Barton, H.F.; Davis, A.; Parsons, G. N.

The effect of surface hydroxylation on MOF formation on ALD metal oxides:  MOF-525 on TiO2/polypropylene for catalytic hydrolysis of chemical warfare agent simulants

ACS Applied Materials and Interfaces. 2020 
DOI: 10.1021/acsami.9b20910

Graphical abstract: Fabrication of a freestanding metal organic framework predominant hollow fiber mat and its potential applications in gas separation and catalysis 245: Dai, Z.; Lee, D. T.; Shi, K.; Wang, S.; Barton, H. F.; Zhu, J.; Yan, J.; Ke, Q.; Parsons, G. N.

Fabrication of Freestanding Metal Organic Framework Predominant Hollow Fiber Mat and Its Potential Applications in Gas Separation and Catalysis

Journal of Materials Chemistry A. 2020 
DOI: 10.1039/C9TA11701F

Abstract Image 244: Nye, R. A.; Kelliher, A.; Gaskins, J.; Hopkins, P.; Parsons, G. N.

Understanding Molecular Layer Deposition Growth Mechanisms in Polyurea via Picosecond Acoustics Analysis

Chemistry of Materials. 2020 
DOI: 10.1021/acs.chemmater.9b0472

243: Xie, Wenyi; Parsons, G. N.

Thermal atomic layer etching of metallic tungsten via oxidation and etch reaction mechanism using Oor Ofor oxidation and WCl6 as the chlorinating etchant

Journal of Vacuum Science and Technology A. 2020 
DOI: 10.1116/1.5134430


242: Lee, D. T.; Parsons, G. N.

Protective Fabrics: Metal-Organic Framework Textiles for Rapid Photocatalytic Sulfur Mustard Simulant Detoxification

Matter. 2019 
DOI: 10.1016/j.matt.2019.11.005

Figure 1 241: Hill, G. T.; Lee, D. T.; Williams, P. S.; Needham, C. D.; Dandley, E. C.; Oldham, C. J.; Parsons, G. N.

Insight on the Sequential Vapor Infiltration Mechanisms of Trimethylaluminum with Poly(methyl methacrylate), Poly(vinylpyrrolidone), and Poly(acrylic acid)

J. Phys Chem. C. 2019 
DOI: 10.1021/acs.jpcc.9b02153

Figure 1 240: Song, S. K.; Saare, H.; Parsons, G. N.

Integrated Isothermal Atomic Layer Deposition/Atomic Layer
Etching Super-Cycles for Area-Selective Deposition of TiO

Chemistry of Materials. 2019 
DOI: 10.1021/acs.chemmater.9b01143

239: Fusco, M. A.; Oldham, C. J.; Parsons, G. N.

Investigation of the Corrosion Behavior of Atomic Layer Deposited Al2O3/TiO2 Nanolaminate Thin Films on Copper in 0.1 M NaCl

Materials. 2019 
DOI: 10.3390/ma12040672

238: Parsons, G. N. 

Functional model for analysis of ALD nucleation and quantification of area-selective deposition

Journal of Vacuum Science and Technology A. 2019
DOI: 10.1116/1.5054285


237: Lee, D. T.; Jamir, J. D.; Peterson, G. W.; Parsons, G. N. 

Water-Stable Chemical-Protective Textiles viz Euhedral Surface-Oriented 2D Cu-TCPP Metal-Organic Frameworks

Small. 2018
DOI: 10.1002/smll.201805133

236: Stevens, E. C.; Mousa, M. M.; Parsons, G. N.

Thermal Atomic Layer Deposition of Sn Metal Using SnCl4 and a Vapor Phase Silyl Dihydropyrazine Reducing Agent

Journal of Vacuum Science and Technology A. 2018

235: King, M.X.; Theofanis, P.; Lemaire, P.C.; Santiso, E.; Parsons, G. N. 

Ab initio Analysis of Nucleation Reactions during Tungsten Atomic Layer Deposition on Si(100) and W(110) Substrates

Journal of Vacuum Science and Technology A. 2018 

Figure 1 234: Xie, W.; Khan, S. A.; Rojas, O. J.; Parsons, G. N.

Control of Micro- and Mesopores in Carbon Nanofibers and Hollow Carbon Nanofibers Derived from Cellulose Diacetate via Vapor Phase Infiltration of Diethyl Zinc

ACS Sustainable Chemistry & Engineering. 2018

233: Cui, K.; Lemaire, P. C.; Zhao, H.; Savas, T.; Parsons, G. N.; Hart, A.J. 

Tungsten-Carbon Nanotube Composite Photonic Crystals as Thermally Stable Spectral-Selective Absorbers and Emitters for Thermophotovoltaics

Advanced Energy Materials. 2018 

Figure 1 232: Dwyer, D.B.; Lee, D. T.; Boyer, S.; Bernier, W. E.; Parsons, G. N.; Jones, W. E.

Toxic Organophosphate Hydrolysis Using Nanofiber-Templated UiO-66-NH2 Metal–Organic Framework Polycrystalline Cylinders

ACS Applied Materials and Interfaces. 2018 

231: Mousa, M. B. M.; Ovental, J. S.; Brozena, A. H.; Oldham, C. J.; Khan, S. A.; Parsons, G. N. 

Modeling and Experimental Demonstration of High-Throughput Flow-Through Spatial Atomic Layer Deposition of Al2O3 Coatings on Textiles at Atmospheric Pressure

Journal of Vacuum Science and Technology A. 2018 

Figure 1 230: Stevens, E.; Tomczak, Y.; Chan, B. T.; Sanchez, E. A.; Parsons, G. N.; Delabie, A. 

Area-Selective Atomic Layer Deposition of TiN, TiO2, and HfO2 on Silicon Nitride with inhibition on Amorphous Carbon

Chemistry of Materials. 2018 

Abstract Image 229: Barton, H. F.; Davis, A. K.; Lee, D. T.; Parsons, G. N.

Solvothermal Synthesis of MIL-96 and UiO-66-NH2 on Atomic Layer Deposited Metal Oxide Coatings on Fiber Mats

JoVE. 2018

Figure 1 228: Xie, W.; Lemaire, P.C.; Parsons, G. N.

Thermally Driven Self-Limiting Atomic Layer Etching of Metallic Tungsten Using WF6 and O2

JACS Applied Materials and Interfaces. 2018 


Abstract Image 227: Lee, D.T.; Zhao, J.; Oldham, C.J.; Peterson, G.W.;  Parsons G.N.

UiO-66-NH2 Metal-Organic Framework (MOF) Nucleation on TiO2, ZnO2, and Al2O3 Atomic Layer Deposition-Treated Polymer Fibers: Role of Metal Oxide on MOF Growth and Catalytic Hydrolysis of Chemical Warfare Agent Stimulants

ACS Applied Materials and Interfaces. 2017

Abstract Image 226: Zhao, J.; Kalanyan, B.; Barton, H.F.; Sperling, B.A.; Parsons G.N.

In Situ Time-Resolved Attenuated Total Reflectance Infrared Spectroscopy for Probing Metal-Organic Framework Thin Film Growth

Chemistry of Materials. 2017

Abstract Image 225: Lemaire, P.C.; Parsons, G.N.

Thermal Selective Vapor Etching of TiO2: Chemical Vapor Etching and Self-Limiting Atomic Layer Etching Using WF6 and BCl3

Chemistry of Materials. 2017

Figure 1 224: Bagal, A; Zhang, X.A.; Shahrin, R.; Dandley, E.C.; Zhao, J.; Poblete, F.R.; Oldham, C.J.; Zhu, Y.; Parsons, G.N.; Bobko, C.; Chang, C.

Large-Area Nanolattice Film with Enhanced Modulus, Hardness, and Energy Dissipation

Scientific Reports. 2017

Abstract Image 223: Tripathi, A.; Parsons, G. N.; Rojas, O. J.; Khan, S. A.

Featherlight, Mechanically Robust Cellulose Ester Aerogels for Environmental Remediation

ACS Omega. 2017

222: Duke, K. S.; Taylor-Just, A. J.; Ihrie, M. D.; Shipkowski, K. A.; Thompson, E. A.; Dandley, E. C.; Parsons, G. N.; Bonner, J. C. 

STAT1-Dependent and -Independent Pulmonary Allergic and Fibrogenic Responses in Mice after Exposure to Tangled versus Rod-like Multi-Walled Carbon Nanotubes

Particle and Fibre Toxicology. 2017

Graphical abstract: Intrinsic limitations of atomic layer deposition for pseudocapacitive metal oxides in porous electrochemical capacitor electrodes 221: Daubert, J. S.; Wang, R.; Ovental, J. S.; Barton, H. F.; Rajagopalan, R.; Augustyn, V.; Parsons, G. N.

Intrinsic Limitations of Atomic Layer Deposition for Pseudocapacitive Metal Oxides in Porous Electrochemical Capacitor Electrodes

Journal of Materials Chemistry A. 2017

Abstract Image

220: Lemaire, P.C.; Lee, D.T.; Zhao, J.; Parsons, G.N.

Reversible Low-Temperature Metal Node Distortion during Atomic Layer Deposition of Al2O3 and TiO2 on UiO-66-NH2 Metal-Organic Framework Crystal Surfaces

ACS Applied Materials and Interfaces. 2017

Abstract Image

219: Lee, D.T.; Zhao, J.; Peterson, G.W.; Parsons, G.N.

Catalytic “MOF-Cloth” Formed via Directed Supramolecular Assembly of UiO-66-NH2 Crystals on Atomic Layer Deposition-Coated Textiles for Rapid Degradation of Chemical Warfare Agent Stimulants

Chemistry of Materials. 2017

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218: Hilton, G. M.; Taylor, A. J.; Hussain, S.; Dandley, E. C.; Griffith, E. H.; Garantziotis, S.; Parsons, G. N.; Bonner, J. C.; Bereman, M. S.

Mapping differential cellular protein response of mouse alveolar epithelial cells to multi-walled carbon nanotubes as a function of atomic layer deposition coating

Nanotoxicology. 2017

 J.S. Daubert Abstract Media

217: Daubert, J.S.; Hill, G.T.; Gotsch, A.P.; Gremaud, A.P.; Ovental, J.S.; Williams, P.S.; Oldham, C.J.; Parsons, G.N.

Corrosion Protection of Copper Using Al2O3, TiO2, ZnO, HfO2, and ZrO2 Atomic Layer Deposition

ACS Applied Materials and Interfaces. 2017

216: Lemaire, P.C.; King, M.; Parsons, G.N.

Understanding inherent substrate selectivity during atomic layer deposition: Effect of surface preparation, hydroxyl density, and metal oxide composition on nucleation mechanisms during tungsten ALD

The Journal of Chemical Physics. 2017